PI’s Ultralow Profile XY-Theta Nanopositioning Stage Uses Air Bearings
Body
If precision motion in six axes is needed, the A-361 XY-Theta stage can be seamlessly integrated with the A-523 Z Tip/Tilt stage, creating a compact 6-degrees-of-freedom nanopositioning system with only 100 mm total height. Six-axis nanopositioning systems are often used in photonics alignment and semiconductor inspection applications.
Industries served
(PI Americas: Auburn, MA) — PI, a global leader in precision motion control and nanopositioning products, has released a unique planar XY-Theta-Z nanopositioning stage based on air bearings and direct drive motors.
Due to the completely contact-free operation and the absence of lubricants, the XY-Theta stage is an excellent fit for clean-room applications.
6-DoF upgrade
By incorporating noncontact components, it ensures frictionless operation, offering not only ultrahigh precision but also superior performance and a completely maintenance-free, virtually infinite service life. The built-in position-locking capability proves useful for operations requiring utmost stability with zero servo jitter.
Clean-room compatible
Semiconductor test and metrology, wafer inspection, photonics alignment, fiber positioning, optics alignment, flat screen inspection, maskless lithography, and ultra-LED manufacturing; the noncontact design is ideal for clean-room applications.
Unlike conventional multi-axis stages, the A-361 employs only one moving platform shared among all three axes. One of its advantages is the ultralow profile of only 40 mm, despite featuring an integrated vacuum chuck to accommodate wafers or other samples. Engineered as a parallel-kinematic multi-axis system, this stage delivers exceptional precision in a remarkably compact package.
