Wafer Automatic Measurement Solution from Nikon
Supports back-end process control
NEXIV VMZ-NWL 200 alleviates the shortage of skilled technicians for manual measurement. The semiconductor industry has developed along the path of miniaturization, which has increased the skill level required for measurement and reduced the number of available engineers. On the other hand, the semiconductor market continues to expand so the increasing metrology opportunities are being offered to ever fewer people. As a result, manual measurements using conventional optical microscopes have reached their limits.