Renishaw Launches inLux SEM Raman Interface

Published: Wednesday, September 20, 2023 – 11:59

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(Renishaw: West Dundee, IL) — Renishaw, pioneer in combining Raman spectroscopy with scanning electron microscopes (SEMs), has launched the inLux SEM Raman interface. Adding the inLux interface enables in situ Raman spectroscopy for highly specific chemical and structural characterization that complements SEM information. The inLux interface is compatible with SEMs from all major manufacturers and can be easily added to new or existing instruments onsite. The innovative design of the interface allows Raman measurements to be performed while the sample is under the SEM beam, providing simultaneous Raman, photoluminescence (PL), or cathodoluminescence (CL) measurements with SEM imaging, making experimental workflows easier and faster.


Renishaw Launches inLux SEM Raman Interface

Enables scanning electron microscopes to perform in situ Raman spectroscopy

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The inLux interface is used without having to move the sample, even when performing mapping measurements, for simple and accurate correlation between the Raman data and SEM images. When not in use, the inLux probe can be withdrawn from the SEM chamber for completely independent use of the SEM.

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Users can collect spectra from single points, multiple points, or generate 2D and 3D confocal Raman images. The inLux interface comes fully equipped for all this work as standard, enabling analysis of areas larger than 0.5 mm in each axis. Fully encoded position control, down to 50 nm, assures precise sample movement.
“Renishaw has been making combined SEM Raman solutions for over 20 years, and the inLux interface is the culmination of our expertise,” said Tim Batten, Renishaw’s spectroscopy platform product manager. “It has been specifically designed as an easy-to-use, bolt-on SEM accessory, opening the world of Raman analysis to all SEM users.”
The inLux interface can be fitted with up to three fiber-optic modules—two different Raman excitation wavelengths from 405 nm to 785 nm, and an optional CL probe. These modules offer flexibility when dealing with fluorescent or challenging samples. The interface is used in conjunction with Renishaw’s research-grade Raman spectrometers and software to provide comprehensive processing and analysis capabilities while being intuitively simple to use. From industrial contamination identification to academic research, the inLux interface can help get the most from SEM measurements.

For further information on the inLux SEM Raman interface, visit